Scanning near-field optical microscopy (SNOM) combined with Kelvin force microscopy (KFM) using a microfabricated force-sensing cantilever with a lead zirconate titanate (PZT) thin film as an integrated deflection sensor have been developed. We applied the frequency modulation (FM) detection method to this setup to increase the detection sensitivity of electrostatic forces between a probe tip and a sample. Latex particles dispersed in a polyvinylalcohol (PVA) thin film deposited onto a glass substrate were stably imaged with the SNOM while both local optical and electrical properties of a ferroelectric thin film were successfully investigated.
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Nobuo SATOH, Shunji WATANABE, Toru FUJII, Kei KOBAYASHI, Hirofumi YAMADA, Kazumi MATSUSHIGE, "Investigations of Local Surface Properties by SNOM Combined with KFM Using a PZT Cantilever" in IEICE TRANSACTIONS on Electronics,
vol. E85-C, no. 12, pp. 2071-2076, December 2002, doi: .
Abstract: Scanning near-field optical microscopy (SNOM) combined with Kelvin force microscopy (KFM) using a microfabricated force-sensing cantilever with a lead zirconate titanate (PZT) thin film as an integrated deflection sensor have been developed. We applied the frequency modulation (FM) detection method to this setup to increase the detection sensitivity of electrostatic forces between a probe tip and a sample. Latex particles dispersed in a polyvinylalcohol (PVA) thin film deposited onto a glass substrate were stably imaged with the SNOM while both local optical and electrical properties of a ferroelectric thin film were successfully investigated.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e85-c_12_2071/_p
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@ARTICLE{e85-c_12_2071,
author={Nobuo SATOH, Shunji WATANABE, Toru FUJII, Kei KOBAYASHI, Hirofumi YAMADA, Kazumi MATSUSHIGE, },
journal={IEICE TRANSACTIONS on Electronics},
title={Investigations of Local Surface Properties by SNOM Combined with KFM Using a PZT Cantilever},
year={2002},
volume={E85-C},
number={12},
pages={2071-2076},
abstract={Scanning near-field optical microscopy (SNOM) combined with Kelvin force microscopy (KFM) using a microfabricated force-sensing cantilever with a lead zirconate titanate (PZT) thin film as an integrated deflection sensor have been developed. We applied the frequency modulation (FM) detection method to this setup to increase the detection sensitivity of electrostatic forces between a probe tip and a sample. Latex particles dispersed in a polyvinylalcohol (PVA) thin film deposited onto a glass substrate were stably imaged with the SNOM while both local optical and electrical properties of a ferroelectric thin film were successfully investigated.},
keywords={},
doi={},
ISSN={},
month={December},}
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TY - JOUR
TI - Investigations of Local Surface Properties by SNOM Combined with KFM Using a PZT Cantilever
T2 - IEICE TRANSACTIONS on Electronics
SP - 2071
EP - 2076
AU - Nobuo SATOH
AU - Shunji WATANABE
AU - Toru FUJII
AU - Kei KOBAYASHI
AU - Hirofumi YAMADA
AU - Kazumi MATSUSHIGE
PY - 2002
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E85-C
IS - 12
JA - IEICE TRANSACTIONS on Electronics
Y1 - December 2002
AB - Scanning near-field optical microscopy (SNOM) combined with Kelvin force microscopy (KFM) using a microfabricated force-sensing cantilever with a lead zirconate titanate (PZT) thin film as an integrated deflection sensor have been developed. We applied the frequency modulation (FM) detection method to this setup to increase the detection sensitivity of electrostatic forces between a probe tip and a sample. Latex particles dispersed in a polyvinylalcohol (PVA) thin film deposited onto a glass substrate were stably imaged with the SNOM while both local optical and electrical properties of a ferroelectric thin film were successfully investigated.
ER -