We have developed and demonstrated a novel technique for electrical inspection and electrical failure analysis, which can detect open, high-resistance, and short circuits without the need for electrical contact with the outside of the LSI chip or the board on which the LSI chip is mounted. The basic idea of the technique is the detection of the magnetic field produced by OBIC (optical beam induced current) or photo current. A DC-SQUID (superconducting quantum interference device) magnetometer is used to detect the magnetic field. This scanning laser-SQUID microscopy ("laser-SQUID" for short) has a spatial resolution of about 1.3 µm. It can be used to distinguish defective chips before bonding pad patterning or after bonding without pin-selection. It can localize any defective site in the chip to within a few square microns.
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Kiyoshi NIKAWA, "Laser-SQUID Microscopy as a Novel Tool for Inspection, Monitoring and Analysis of LSI-Chip-Defects: Nondestructive and Non-electrical-contact Technique" in IEICE TRANSACTIONS on Electronics,
vol. E85-C, no. 3, pp. 746-751, March 2002, doi: .
Abstract: We have developed and demonstrated a novel technique for electrical inspection and electrical failure analysis, which can detect open, high-resistance, and short circuits without the need for electrical contact with the outside of the LSI chip or the board on which the LSI chip is mounted. The basic idea of the technique is the detection of the magnetic field produced by OBIC (optical beam induced current) or photo current. A DC-SQUID (superconducting quantum interference device) magnetometer is used to detect the magnetic field. This scanning laser-SQUID microscopy ("laser-SQUID" for short) has a spatial resolution of about 1.3 µm. It can be used to distinguish defective chips before bonding pad patterning or after bonding without pin-selection. It can localize any defective site in the chip to within a few square microns.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e85-c_3_746/_p
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@ARTICLE{e85-c_3_746,
author={Kiyoshi NIKAWA, },
journal={IEICE TRANSACTIONS on Electronics},
title={Laser-SQUID Microscopy as a Novel Tool for Inspection, Monitoring and Analysis of LSI-Chip-Defects: Nondestructive and Non-electrical-contact Technique},
year={2002},
volume={E85-C},
number={3},
pages={746-751},
abstract={We have developed and demonstrated a novel technique for electrical inspection and electrical failure analysis, which can detect open, high-resistance, and short circuits without the need for electrical contact with the outside of the LSI chip or the board on which the LSI chip is mounted. The basic idea of the technique is the detection of the magnetic field produced by OBIC (optical beam induced current) or photo current. A DC-SQUID (superconducting quantum interference device) magnetometer is used to detect the magnetic field. This scanning laser-SQUID microscopy ("laser-SQUID" for short) has a spatial resolution of about 1.3 µm. It can be used to distinguish defective chips before bonding pad patterning or after bonding without pin-selection. It can localize any defective site in the chip to within a few square microns.},
keywords={},
doi={},
ISSN={},
month={March},}
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TY - JOUR
TI - Laser-SQUID Microscopy as a Novel Tool for Inspection, Monitoring and Analysis of LSI-Chip-Defects: Nondestructive and Non-electrical-contact Technique
T2 - IEICE TRANSACTIONS on Electronics
SP - 746
EP - 751
AU - Kiyoshi NIKAWA
PY - 2002
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E85-C
IS - 3
JA - IEICE TRANSACTIONS on Electronics
Y1 - March 2002
AB - We have developed and demonstrated a novel technique for electrical inspection and electrical failure analysis, which can detect open, high-resistance, and short circuits without the need for electrical contact with the outside of the LSI chip or the board on which the LSI chip is mounted. The basic idea of the technique is the detection of the magnetic field produced by OBIC (optical beam induced current) or photo current. A DC-SQUID (superconducting quantum interference device) magnetometer is used to detect the magnetic field. This scanning laser-SQUID microscopy ("laser-SQUID" for short) has a spatial resolution of about 1.3 µm. It can be used to distinguish defective chips before bonding pad patterning or after bonding without pin-selection. It can localize any defective site in the chip to within a few square microns.
ER -