We demonstrate a single high-order transverse mode surface emitting laser (VCSEL) with narrow trenches formed on a top surface. The design and the fabrication of a single high-order mode 850 nm GaAs VCSEL with micromachined surface relief are presented. Stable single-mode operation with a side-mode suppression ratio of over 40 dB was obtained in an entire measured current range. We obtained the maximum single mode power of over 3.5 mW and a record low series resistance of below 50 Ω. In addition, a single-lobe far field pattern is demonstrated even under high-order transverse mode operation by loading phase-shift on the top surface. A coupling efficiency with optical fibers is dramatically improved.
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Satoshi SHINADA, Fumio KOYAMA, Nobuhiko NISHIYAMA, Masakazu ARAI, "Single High-Order Transverse Mode Surface Emitting Laser with Micromachined Surface Relief" in IEICE TRANSACTIONS on Electronics,
vol. E85-C, no. 4, pp. 995-1000, April 2002, doi: .
Abstract: We demonstrate a single high-order transverse mode surface emitting laser (VCSEL) with narrow trenches formed on a top surface. The design and the fabrication of a single high-order mode 850 nm GaAs VCSEL with micromachined surface relief are presented. Stable single-mode operation with a side-mode suppression ratio of over 40 dB was obtained in an entire measured current range. We obtained the maximum single mode power of over 3.5 mW and a record low series resistance of below 50 Ω. In addition, a single-lobe far field pattern is demonstrated even under high-order transverse mode operation by loading phase-shift on the top surface. A coupling efficiency with optical fibers is dramatically improved.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e85-c_4_995/_p
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@ARTICLE{e85-c_4_995,
author={Satoshi SHINADA, Fumio KOYAMA, Nobuhiko NISHIYAMA, Masakazu ARAI, },
journal={IEICE TRANSACTIONS on Electronics},
title={Single High-Order Transverse Mode Surface Emitting Laser with Micromachined Surface Relief},
year={2002},
volume={E85-C},
number={4},
pages={995-1000},
abstract={We demonstrate a single high-order transverse mode surface emitting laser (VCSEL) with narrow trenches formed on a top surface. The design and the fabrication of a single high-order mode 850 nm GaAs VCSEL with micromachined surface relief are presented. Stable single-mode operation with a side-mode suppression ratio of over 40 dB was obtained in an entire measured current range. We obtained the maximum single mode power of over 3.5 mW and a record low series resistance of below 50 Ω. In addition, a single-lobe far field pattern is demonstrated even under high-order transverse mode operation by loading phase-shift on the top surface. A coupling efficiency with optical fibers is dramatically improved.},
keywords={},
doi={},
ISSN={},
month={April},}
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TY - JOUR
TI - Single High-Order Transverse Mode Surface Emitting Laser with Micromachined Surface Relief
T2 - IEICE TRANSACTIONS on Electronics
SP - 995
EP - 1000
AU - Satoshi SHINADA
AU - Fumio KOYAMA
AU - Nobuhiko NISHIYAMA
AU - Masakazu ARAI
PY - 2002
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E85-C
IS - 4
JA - IEICE TRANSACTIONS on Electronics
Y1 - April 2002
AB - We demonstrate a single high-order transverse mode surface emitting laser (VCSEL) with narrow trenches formed on a top surface. The design and the fabrication of a single high-order mode 850 nm GaAs VCSEL with micromachined surface relief are presented. Stable single-mode operation with a side-mode suppression ratio of over 40 dB was obtained in an entire measured current range. We obtained the maximum single mode power of over 3.5 mW and a record low series resistance of below 50 Ω. In addition, a single-lobe far field pattern is demonstrated even under high-order transverse mode operation by loading phase-shift on the top surface. A coupling efficiency with optical fibers is dramatically improved.
ER -