Horizontal slot waveguides enable light to be strongly confined in thin regions. The strong confinement of light in the slot region offers the advantages of enhancing the interaction of light with matter and providing highly sensitive sensing devices. We theoretically investigated fundamental characteristics of horizontal slot waveguides using Nb2O5. The coupling coefficient between SiO2 slot and air slot waveguides was calculated. Characteristics of bending loss in slot waveguide were also analyzed. The etching conditions in reactive ion etching needed to obtain a sidewall with high verticality were studied. We propose a process for fabricating horizontal slot waveguides using Nb2O5 thin film deposition and selective etching of SiO2. Horizontal slot waveguides were fabricated that had an SiO2 slot of less than 30 nm SiO2. The propagated light passing through the slot waveguides was also obtained.
Yoshiki HAYAMA
Kanagawa Institute of Technology
Katsumi NAKATSUHARA
Kanagawa Institute of Technology
Shinta UCHIBORI
Kanagawa Institute of Technology
Takeshi NISHIZAWA
Kanagawa Institute of Technology
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Yoshiki HAYAMA, Katsumi NAKATSUHARA, Shinta UCHIBORI, Takeshi NISHIZAWA, "Study on Analysis and Fabrication Conditions of Horizontal SiO2 Slot Waveguides Using Nb2O5" in IEICE TRANSACTIONS on Electronics,
vol. E103-C, no. 11, pp. 669-678, November 2020, doi: 10.1587/transele.2019OCP0007.
Abstract: Horizontal slot waveguides enable light to be strongly confined in thin regions. The strong confinement of light in the slot region offers the advantages of enhancing the interaction of light with matter and providing highly sensitive sensing devices. We theoretically investigated fundamental characteristics of horizontal slot waveguides using Nb2O5. The coupling coefficient between SiO2 slot and air slot waveguides was calculated. Characteristics of bending loss in slot waveguide were also analyzed. The etching conditions in reactive ion etching needed to obtain a sidewall with high verticality were studied. We propose a process for fabricating horizontal slot waveguides using Nb2O5 thin film deposition and selective etching of SiO2. Horizontal slot waveguides were fabricated that had an SiO2 slot of less than 30 nm SiO2. The propagated light passing through the slot waveguides was also obtained.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/transele.2019OCP0007/_p
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@ARTICLE{e103-c_11_669,
author={Yoshiki HAYAMA, Katsumi NAKATSUHARA, Shinta UCHIBORI, Takeshi NISHIZAWA, },
journal={IEICE TRANSACTIONS on Electronics},
title={Study on Analysis and Fabrication Conditions of Horizontal SiO2 Slot Waveguides Using Nb2O5},
year={2020},
volume={E103-C},
number={11},
pages={669-678},
abstract={Horizontal slot waveguides enable light to be strongly confined in thin regions. The strong confinement of light in the slot region offers the advantages of enhancing the interaction of light with matter and providing highly sensitive sensing devices. We theoretically investigated fundamental characteristics of horizontal slot waveguides using Nb2O5. The coupling coefficient between SiO2 slot and air slot waveguides was calculated. Characteristics of bending loss in slot waveguide were also analyzed. The etching conditions in reactive ion etching needed to obtain a sidewall with high verticality were studied. We propose a process for fabricating horizontal slot waveguides using Nb2O5 thin film deposition and selective etching of SiO2. Horizontal slot waveguides were fabricated that had an SiO2 slot of less than 30 nm SiO2. The propagated light passing through the slot waveguides was also obtained.},
keywords={},
doi={10.1587/transele.2019OCP0007},
ISSN={1745-1353},
month={November},}
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TY - JOUR
TI - Study on Analysis and Fabrication Conditions of Horizontal SiO2 Slot Waveguides Using Nb2O5
T2 - IEICE TRANSACTIONS on Electronics
SP - 669
EP - 678
AU - Yoshiki HAYAMA
AU - Katsumi NAKATSUHARA
AU - Shinta UCHIBORI
AU - Takeshi NISHIZAWA
PY - 2020
DO - 10.1587/transele.2019OCP0007
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E103-C
IS - 11
JA - IEICE TRANSACTIONS on Electronics
Y1 - November 2020
AB - Horizontal slot waveguides enable light to be strongly confined in thin regions. The strong confinement of light in the slot region offers the advantages of enhancing the interaction of light with matter and providing highly sensitive sensing devices. We theoretically investigated fundamental characteristics of horizontal slot waveguides using Nb2O5. The coupling coefficient between SiO2 slot and air slot waveguides was calculated. Characteristics of bending loss in slot waveguide were also analyzed. The etching conditions in reactive ion etching needed to obtain a sidewall with high verticality were studied. We propose a process for fabricating horizontal slot waveguides using Nb2O5 thin film deposition and selective etching of SiO2. Horizontal slot waveguides were fabricated that had an SiO2 slot of less than 30 nm SiO2. The propagated light passing through the slot waveguides was also obtained.
ER -