To achieve conductive and wear-durable carbon thin films by metal doping, we deposited Au-, Pt-, and Pd-doped carbon thin films by RF sputtering, and evaluated the dopant concentrations, resistivity, and scratch hardness. Among the doped films, the Pt-doped film with low Pt concentration was most suitable from a practical perspective.
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Mitsunori YABE, Shigeru UMEMURA, Shigeru HIRONO, "Electrical and Mechanical Characteristics of Au-, Pt-, and Pd-Doped Carbon Thin Films" in IEICE TRANSACTIONS on Electronics,
vol. E93-C, no. 4, pp. 527-530, April 2010, doi: 10.1587/transele.E93.C.527.
Abstract: To achieve conductive and wear-durable carbon thin films by metal doping, we deposited Au-, Pt-, and Pd-doped carbon thin films by RF sputtering, and evaluated the dopant concentrations, resistivity, and scratch hardness. Among the doped films, the Pt-doped film with low Pt concentration was most suitable from a practical perspective.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/transele.E93.C.527/_p
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@ARTICLE{e93-c_4_527,
author={Mitsunori YABE, Shigeru UMEMURA, Shigeru HIRONO, },
journal={IEICE TRANSACTIONS on Electronics},
title={Electrical and Mechanical Characteristics of Au-, Pt-, and Pd-Doped Carbon Thin Films},
year={2010},
volume={E93-C},
number={4},
pages={527-530},
abstract={To achieve conductive and wear-durable carbon thin films by metal doping, we deposited Au-, Pt-, and Pd-doped carbon thin films by RF sputtering, and evaluated the dopant concentrations, resistivity, and scratch hardness. Among the doped films, the Pt-doped film with low Pt concentration was most suitable from a practical perspective.},
keywords={},
doi={10.1587/transele.E93.C.527},
ISSN={1745-1353},
month={April},}
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TY - JOUR
TI - Electrical and Mechanical Characteristics of Au-, Pt-, and Pd-Doped Carbon Thin Films
T2 - IEICE TRANSACTIONS on Electronics
SP - 527
EP - 530
AU - Mitsunori YABE
AU - Shigeru UMEMURA
AU - Shigeru HIRONO
PY - 2010
DO - 10.1587/transele.E93.C.527
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E93-C
IS - 4
JA - IEICE TRANSACTIONS on Electronics
Y1 - April 2010
AB - To achieve conductive and wear-durable carbon thin films by metal doping, we deposited Au-, Pt-, and Pd-doped carbon thin films by RF sputtering, and evaluated the dopant concentrations, resistivity, and scratch hardness. Among the doped films, the Pt-doped film with low Pt concentration was most suitable from a practical perspective.
ER -