The search functionality is under construction.
The search functionality is under construction.

Electrical and Mechanical Characteristics of Au-, Pt-, and Pd-Doped Carbon Thin Films

Mitsunori YABE, Shigeru UMEMURA, Shigeru HIRONO

  • Full Text Views

    0

  • Cite this

Summary :

To achieve conductive and wear-durable carbon thin films by metal doping, we deposited Au-, Pt-, and Pd-doped carbon thin films by RF sputtering, and evaluated the dopant concentrations, resistivity, and scratch hardness. Among the doped films, the Pt-doped film with low Pt concentration was most suitable from a practical perspective.

Publication
IEICE TRANSACTIONS on Electronics Vol.E93-C No.4 pp.527-530
Publication Date
2010/04/01
Publicized
Online ISSN
1745-1353
DOI
10.1587/transele.E93.C.527
Type of Manuscript
BRIEF PAPER
Category
Electromechanical Devices and Components

Authors

Keyword