The search functionality is under construction.

Author Search Result

[Author] Daisuke SASAGURI(1hit)

1-1hit
  • Ion Beam Modified Photoresist A New Class of Field Emitter Material for Large Area Devices

    Tanemasa ASANO  Daisuke SASAGURI  Katsuya HIGA  

     
    PAPER

      Vol:
    E81-C No:11
      Page(s):
    1715-1720

    Ion beam irradiation effects on a novolac positive-tone photoresist and its application to micron-size field emitters have been investigated. Irradiation of Ar and P ions was examined. The electrical resistivity of the photoresist film is found to decrease after Ar ion implantation at doses on the order of 1016 cm-2. Baking of the photoresist prior to irradiation at a high temperature is preferred to produce electrical conductivity. P ions show weaker effects than Ar ions. Raman spectroscopy shows that carbon-carbon bonds such as the graphite bond are produced due to ion bombardment. The field emission of electrons is observed from emitters made of the ion-irradiated photoresist. The emission current is shown to be fairly stable when it is compared with an emission characteristic of synthesized diamond. Fabrication of field emitter arrays using a mold technique is demonstrated. The field emitter array shows emission at a current level of about 40 µA.