RF noise in quarter-micron nMOSFETs is analysed on the device level based on Shockley's impedance field method. The impact of different transport models and physical parameters is discussed in detail. Well-calibrated drift-diffusion and energy-balance models give very similar results for noise current spectral densities and noise figures. We show by numerical simulations with the general-purpose device simulator DESSIS_ISE that the hot-electron effect on RF noise is unimportant under normal operating conditions and that thermal substrate noise is dominant below 0.5 GHz. The contribution of energy-current fluctuations to the terminal noise is found to be negligible. Application of noise sources generated in bulk full-band Monte Carlo simulations changes the noise figures considerably, which underlines the importance of proper noise source models for far-from-equilibrium conditions.

The validity and capability of an iterative coupling scheme between single-particle frozen-field Monte Carlo simulations and nonlinear Poisson solutions for achieving self-consistency is investigated. For this purpose, a realistic 0.1 µm lightly-doped-drain (LDD) n-MOSFET with a maximum doping level of about 2.5 1020 cm-3 is simulated. It is found that taking the drift-diffusion (DD) or the hydrodynamic (HD) model as initial simulation leads to the same Monte Carlo result for the drain current. This shows that different electron densities taken either from a DD or a HD simulation in the bulk region, which is never visited by Monte Carlo electrons, have a negligible influence on the solution of the Poisson equation. For the device investigated about ten iterations are necessary to reach the stationary state after which gathering of cumulative averages can begin. Together with the absence of stability problems at high doping levels this makes the self-consistent single-particle approach (SPARTA) a robust and efficient method for the simulation of nanoscale MOSFETs where quasi-ballistic transport is crucial for the on-current.