A complex modular process flow was developed for PRISM technology to permit increased system integration. In order to combine the required functions--submicron CMOS Logic, Nonvolatile Memories, Precision Linear, and Power Drivers--on a monolithic silicon chip, a highly structured, systematic approach to process synthesis was developed. TCAD tools were used extensively for process design and verification. The 60 V LDMOS power transistor and the Flash memory cell built in the technology will be described to illustrate the process synthesis methodology.