We succeeded to fabricate p-n heterojunction and bulkheterojunction small-molecular-weight organic thin-film solar cells by combination of dry (p-type = zinc phthalocyanine, n-type = fullerene) and wet (p-type = tetra-tert-butyl zinc phthalocyanine, n-type = [6,6]-phenyl-C61-buteric acid methyl ester) processes. Relationship between morphologies of semiconducting layers and photovoltaic properties was investigated. The p-n heterojunction organic thin-film solar cells based on dry process, where surface roughness was approximately 2 nm, showed the highest power conversion efficiency of 1.3% in this paper.