We propose a three-dimensional structure on a planar substrate employing micromachining technology. A low-loss suspended structure incorporating a BCB membrane employing deep trench etching technology has been newly proposed. A micromachined suspended line structure using BCB membrane film enables us to realize a low loss planar resonator, which achieved an unloaded quality factor (Q-factor) of more than 280 at 60 GHz. We design low-loss filters and antennas built into silicon in a 60 GHz band. A low-loss filter realizes an insertion loss of 1.0 dB at 60 GHz and a patch antenna obtains a 3% bandwidth. In addition, we demonstrate a 60 GHz receiver front-end IC incorporating the planar filter and the antenna, and obtain good results. These techniques enable us to integrate various functions into a compact package even in millimeter-wave bands.

This paper describes newly developed miniaturized stepped impedance resonators with a double coaxial structure (DC-SIR's) and their application to bandpass filters. The new DC-SIR's using dielectric material are devised for more compact and lower frequency bandpass filters. Fundamental characteristics such as resonance properties and unloaded-Q make it clear that DC-SIR's have attractive features that miniaturization can be achieved without Q-factor degradation. Trial 400 MHz bandpass filters incorporating DC-SIR's are also made. Experimental results of bandpass filters proved that DC-SIR's are applicable to lower frequency band radio equipment and able to contribute to the expansion of applicable frequency ranges of dielectric coaxial resonators.

In general, the attenuation characteristics of band-pass filters can be improved by generating attenuation poles in the stop band. In this paper, a design method for a planar band-pass filter with attenuation poles based on a half-wavelength resonator is proposed. According to this design, the attenuation poles can be obtained at any desired frequency by means of coupling structures. Two kinds of filter with the characteristics of steep skirt and wide stop-band were designed and fabricated with the result that the validity of the design method was demonstrated. Therefore, a filter with excellent attenuation characteristics for various applications can be achieved.