We propose an nn optical switch that is suitable for flexible and reliable optical access networks and for reconfigurable optical inter-module connections in large-scale processing systems. The switch consists of an intersecting waveguide matrix, matching oil, and microactuators. Switching is based on the movement of oil due to capillary pressure, which is controlled by the microactuator. The necessary switching conditions were calculated and the results showed that both the oil volume and the microactuator position must be controlled. A trial optical switch was fabricated to test the switching principle, and switching and self-holding were both confirmed. These results show the feasibility of a very small self-holding nn optical switch that uses a waveguide matrix and microactuators made by using microfabrication technologies.

We studied the supply and removal of oil to and from a thin groove and the consequent insertion loss, aiming at matrix optical waveguide switches that utilize optical reflection and transmission effects at the groove. A robot precisely controlled the position of the removal nozzle and the supply needle by a vision servo. The optimum position for the removal nozzle was at the entrance of the groove to a circular oil pool, and the positioning margin was 10-15µm around the optimum position. The on-off ratio of the switching light power at the optimum position was about 30dB. The removal time was proportional to the kinetic viscosity of the oil, and the optimum height of the removal nozzle was independent of the kinetic viscosity of the oil. An analysis of the insertion loss revealed that the main factor in the loss at the reflection is the tilt of the groove wall.