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Sin Jun KANG Seok Ho JANG Hee Soo HWANG Kwang Bang WOO
In this paper, an effective method of system modeling and dynamic scheduling to improve operation and control for the Back-End process of semiconductor manufacturing is developed by using Colored Timed Petri-Nets (CTPNs). The simulator of a CTPNs model was utilized to generate a new heuristic scheduling method with genetic algorithm(GA) which enables us to obtain the optimal values of the weighted delay time and standard deviation of lead time.