The temperature dependence of central wavelength of optical filters is a serious problem for the dense WDM systems. This dependence is owing to the temperature dependence of optical path-length of the waveguide. In this study, we realized a temperature independent silica-based optical filter at 1. 55 µm wavelength using an athermal waveguide, in which optical pathlength is independent of temperature. First, we designed a silica-based athermal waveguide, and next we designed and fabricated a ring resonator using the athermal waveguide. As a result, we successfully decreased the temperature dependence of central wavelength to less than 4 10 -4 nm/K, which is 3% and 0. 3% of corresponding values of conventional silica-based and semiconductor waveguide filters, respectively.

The temperature dependence of the central wavelength of narrow-band filters is a serious problem for the dense WDM systems. In this study, we realized a temperature independent narrow-band filter at 1.3 µm wavelength. First, we designed an athermal waveguide in which optical path length is independent of temperature by using a finite element method. Using this athermal waveguide, we designed and fabricated a ring resonator. As a result, we successfully decreased the temperature coefficient of central wavelength to 710-4 nm/K, which is 7% of conventional SiO2 waveguide filters and 0.7% of conventional semiconductor waveguide filters.