Some electromechanical devices and systems produced using MEMS fabrication processes are detailed. Two precision measurement metrologies for inspecting electromechanical products are also described. As the trend of electromechanical devices has been towards smaller and smaller sizes possessing robust mechanisms and powerful functions, micro-electric-mechanical system (MEMS) devices are becoming more the choice for meeting such requirements. Three MEMS examples are discussed in detail in this paper: CMOS compatible sensors, RF/microwave components, and packaged and integrated passive devices. The design thinking of a new free-fall sensor, which is an accelerometer and possesses a surprisingly low frequency response and broad bandwidth, is mentioned. In addition, an AVID (dvanced ibrometer/nterferometer evice) system for measuring tiny displacement as well as a Morphinscope system that has the advantage of a confocal microscope combined with a photon tunneling microscope and both developed by NTU's MEMS/NEMS group, are discussed. The excellent sensing ability of the free-fall sensor and the accuracy resolution of the two measurement systems are proved by experimental verification.