The 4th harmonics of a Nd:YAG laser beam (266 nm) is applied to fabricate highly oriented Y1Ba2Cu3O7-δ -SrTiO3-Y1Ba2Cu3O7-δ multilayer structures. It has been shown that the emission temperature of a film surface will change during deposition, depending on deposition conditions, even though the heater temperature is constant. The change of substrate temperature is strongly correlated to film characteristics such as critical temperature, c-axis length, and resistivity. The insitu monitoring of the substrate temperature is useful for obtaining high-quality Y1Ba2Cu3O7-δ films reproducibly. It is also shown that a SrTiO3 layer prevents oxygen restoration in a Y1Ba2Cu3O7-δ underlayer. The relationship between oxygen deficiency and the annealing conditions is studied.

In the weakly coupled grain model which has been proposed to explain the residual surface resistance in high-Tc superconducting polycrystalline thin films, the superconducting polycrystalline thin films is described as a network of superconducting grains coupled via Josephson junctions. In order to evaluate this model we have fabricated the coplanar waveguide resonator using c-axis oriented YBa2Cu3Ox Thin Films and measured the residual surface resistance. The experimental results are in good agreement with theoretical prediction.