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Takanori KUBO Shigeo TANAHASHI Kazuhiro KAWABATA Ryoji JIKUHARA Gentaro KAJI Masami TERASAWA Hiroshi NAKAGAWA Masahiro AOYAGI Youichi HAMAZAKI Itaru KUROSAWA Susumu TAKADA
A new built-in drive circuit for superconducting Josephson LSI circuits has been designed and fabricated in a ceramic multichip module. The drive circuit consists of an impedance matching circuit and a DC bias current feeding circuit to supply a two-phase power current to Josephson chips at a microwave frequency. The impedance matching circuit was designed based on a quarter wavelength stripline. A balanced stripline configuration was introduced to reduce the fluctuation of ground potential. Tungsten layers were used to make the drive circuit in a multilayer ceramic substrate of the multichip module. Whole circuit was successfully packed in a volume of 76 mm38 mm1.7 mm. The gain of microwave current were 20 dB around 1.2 GHz and 23 dB around 3.6 GHz, which were in good agreement with the simulated current gain.