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Nobumitsu HIROSE Yuuichi HARADA Shigeru YOSHIMORI Mitsuo KAWAMURA
We fabricated micro-contact Josephson junctions by self-alignment process, using double-layer-resist electron beam exposure and RIE. We chose Nb as superconductive materials. The junctions show the A.C. Josephson effect under the millimeter wave (70 GHz) radiation less than 100 µW and the 7th Shapiro step.