This paper was written for LSI engineers in order to demonstrate the effect of optical interconnections in LSIs to improve both the speed and power performances of 0.5 and 0.2 µm CMOS microprocessors. The feasibilities and problems regarding new micronsize optoelectronic devices as well as associated electronics are discussed. Actual circuit structures clocks and bus lines used for optical interconnection are discussed. Newly designed optical interconnections and the speed power performances are compared with those of the original electrical interconnection systems.