A micromirror for an external cavity diode laser is described. The mirror is supported by two sets of parallel torsion bars enabling piston motion as well as rotation. These motions are for realizing continuous wavelength tuning. Adjusting two rotations electrically, the pivot of the mirror rotation can be controlled. The long stroke of the vertical comb is realized by the deep three-dimensional structure prepared by the wafer bending method.

An electrostatically driven micromirror is described. The vertical comb of a three-dimensional microstructure is realized by bending the device wafer having microstructures. By resetting the bending angle, the tuning of the vertical gap between moving and stationary combs is possible. The characteristics of the vertical comb drive actuator can be tuned, confirming the performance.