Three-Dimensional Nanostructure Fabrication by Focused-Ion-Beam Chemical Vapor Deposition and Its Applications

Shinji MATSUI; Reo KOMETANI

doi:10.1093/ietele/e90-c.1.25

Three-Dimensional Nanostructure Fabrication by Focused-Ion-Beam Chemical Vapor Deposition and Its Applications

Shinji MATSUI, Reo KOMETANI

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Three-dimensional nanostructure fabrication has been demonstrated by 30 keV Ga⁺ focused-ion-beam chemical-vapor-deposition (FIB-CVD) using a phenanthrene (C₁₄H₁₀) source as a precursor. Microstructure plastic arts is advocated as a new field using micro-beam technology, presenting one example of micro-wine-glass with 2.75 µm external diameter and 12 µm height. The deposition film is a diamondlike amorphous carbon. A large Young's modulus that exceeds 600 GPa seems to present great possibilities for various applications. Producing of three-dimensional nanostructure is discussed. Micro-coil, nanoelectrostatic actuator, and nano-space-wiring with 0.1 µm dimension are demonstrated as parts of nanomechanical system. Furthermore, nanoinjector and nanomanipulator are also fabricated as a novel nano-tool for manipulation and analysis of subcellular organelles.

Publication: IEICE TRANSACTIONS on Electronics Vol.E90-C No.1 pp.25-35

Publication Date: 2007/01/01

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Online ISSN: 1745-1353

DOI: 10.1093/ietele/e90-c.1.25

Type of Manuscript: Special Section INVITED PAPER (Special Section on Microoptomechatronics)

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Shinji MATSUI, Reo KOMETANI, "Three-Dimensional Nanostructure Fabrication by Focused-Ion-Beam Chemical Vapor Deposition and Its Applications" in IEICE TRANSACTIONS on Electronics, vol. E90-C, no. 1, pp. 25-35, January 2007, doi: 10.1093/ietele/e90-c.1.25.
Abstract: Three-dimensional nanostructure fabrication has been demonstrated by 30 keV Ga⁺ focused-ion-beam chemical-vapor-deposition (FIB-CVD) using a phenanthrene (C₁₄H₁₀) source as a precursor. Microstructure plastic arts is advocated as a new field using micro-beam technology, presenting one example of micro-wine-glass with 2.75 µm external diameter and 12 µm height. The deposition film is a diamondlike amorphous carbon. A large Young's modulus that exceeds 600 GPa seems to present great possibilities for various applications. Producing of three-dimensional nanostructure is discussed. Micro-coil, nanoelectrostatic actuator, and nano-space-wiring with 0.1 µm dimension are demonstrated as parts of nanomechanical system. Furthermore, nanoinjector and nanomanipulator are also fabricated as a novel nano-tool for manipulation and analysis of subcellular organelles.
URL: https://global.ieice.org/en_transactions/electronics/10.1093/ietele/e90-c.1.25/_p

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@ARTICLE{e90-c_1_25,
author={Shinji MATSUI, Reo KOMETANI, },
journal={IEICE TRANSACTIONS on Electronics},
title={Three-Dimensional Nanostructure Fabrication by Focused-Ion-Beam Chemical Vapor Deposition and Its Applications},
year={2007},
volume={E90-C},
number={1},
pages={25-35},
abstract={Three-dimensional nanostructure fabrication has been demonstrated by 30 keV Ga⁺ focused-ion-beam chemical-vapor-deposition (FIB-CVD) using a phenanthrene (C₁₄H₁₀) source as a precursor. Microstructure plastic arts is advocated as a new field using micro-beam technology, presenting one example of micro-wine-glass with 2.75 µm external diameter and 12 µm height. The deposition film is a diamondlike amorphous carbon. A large Young's modulus that exceeds 600 GPa seems to present great possibilities for various applications. Producing of three-dimensional nanostructure is discussed. Micro-coil, nanoelectrostatic actuator, and nano-space-wiring with 0.1 µm dimension are demonstrated as parts of nanomechanical system. Furthermore, nanoinjector and nanomanipulator are also fabricated as a novel nano-tool for manipulation and analysis of subcellular organelles.},
keywords={},
doi={10.1093/ietele/e90-c.1.25},
ISSN={1745-1353},
month={January},}

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TY - JOUR
TI - Three-Dimensional Nanostructure Fabrication by Focused-Ion-Beam Chemical Vapor Deposition and Its Applications
T2 - IEICE TRANSACTIONS on Electronics
SP - 25
EP - 35
AU - Shinji MATSUI
AU - Reo KOMETANI
PY - 2007
DO - 10.1093/ietele/e90-c.1.25
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E90-C
IS - 1
JA - IEICE TRANSACTIONS on Electronics
Y1 - January 2007
AB - Three-dimensional nanostructure fabrication has been demonstrated by 30 keV Ga⁺ focused-ion-beam chemical-vapor-deposition (FIB-CVD) using a phenanthrene (C₁₄H₁₀) source as a precursor. Microstructure plastic arts is advocated as a new field using micro-beam technology, presenting one example of micro-wine-glass with 2.75 µm external diameter and 12 µm height. The deposition film is a diamondlike amorphous carbon. A large Young's modulus that exceeds 600 GPa seems to present great possibilities for various applications. Producing of three-dimensional nanostructure is discussed. Micro-coil, nanoelectrostatic actuator, and nano-space-wiring with 0.1 µm dimension are demonstrated as parts of nanomechanical system. Furthermore, nanoinjector and nanomanipulator are also fabricated as a novel nano-tool for manipulation and analysis of subcellular organelles.
ER -