An Ultra-Deep High-Q Microwave Cavity Resonator Fabricated Using Deep X-Ray Lithography
Summary :
An ultra-deep polymer cavity structure exposed using deep X-ray lithography is used as a template for metal electroforming to produce a 24-GHz cavity resonator. The metal cavity is 1.8 mm deep and has impressive structure, including extremely vertical and smooth sidewalls, resulting in low conductor loss. The measured resonator has an unloaded quality factor of above 1800 at a resonant frequency of 23.89 GHz.
- Publication
- IEICE TRANSACTIONS on Electronics Vol.E90-C No.12 pp.2192-2197
- Publication Date
- 2007/12/01
- Publicized
- Online ISSN
- 1745-1353
- DOI
- 10.1093/ietele/e90-c.12.2192
- Type of Manuscript
- Special Section PAPER (Special Section on Recent Technologies for Microwave and Millimeter-wave Passive Devices)
- Category
Authors
Keyword
Latest Issue
Copyrights notice of machine-translated contents
The copyright of the original papers published on this site belongs to IEICE. Unauthorized use of the original or translated papers is prohibited. See IEICE Provisions on Copyright for details.
Cite this
Copy
Zhen MA, David M. KLYMYSHYN, Sven ACHENBACH, Martin BORNER, Nina DAMBROWSKY, Jurgen MOHR, "An Ultra-Deep High-Q Microwave Cavity Resonator Fabricated Using Deep X-Ray Lithography" in IEICE TRANSACTIONS on Electronics,
vol. E90-C, no. 12, pp. 2192-2197, December 2007, doi: 10.1093/ietele/e90-c.12.2192.
Abstract: An ultra-deep polymer cavity structure exposed using deep X-ray lithography is used as a template for metal electroforming to produce a 24-GHz cavity resonator. The metal cavity is 1.8 mm deep and has impressive structure, including extremely vertical and smooth sidewalls, resulting in low conductor loss. The measured resonator has an unloaded quality factor of above 1800 at a resonant frequency of 23.89 GHz.
URL: https://global.ieice.org/en_transactions/electronics/10.1093/ietele/e90-c.12.2192/_p
Copy
@ARTICLE{e90-c_12_2192,
author={Zhen MA, David M. KLYMYSHYN, Sven ACHENBACH, Martin BORNER, Nina DAMBROWSKY, Jurgen MOHR, },
journal={IEICE TRANSACTIONS on Electronics},
title={An Ultra-Deep High-Q Microwave Cavity Resonator Fabricated Using Deep X-Ray Lithography},
year={2007},
volume={E90-C},
number={12},
pages={2192-2197},
abstract={An ultra-deep polymer cavity structure exposed using deep X-ray lithography is used as a template for metal electroforming to produce a 24-GHz cavity resonator. The metal cavity is 1.8 mm deep and has impressive structure, including extremely vertical and smooth sidewalls, resulting in low conductor loss. The measured resonator has an unloaded quality factor of above 1800 at a resonant frequency of 23.89 GHz.},
keywords={},
doi={10.1093/ietele/e90-c.12.2192},
ISSN={1745-1353},
month={December},}
Copy
TY - JOUR
TI - An Ultra-Deep High-Q Microwave Cavity Resonator Fabricated Using Deep X-Ray Lithography
T2 - IEICE TRANSACTIONS on Electronics
SP - 2192
EP - 2197
AU - Zhen MA
AU - David M. KLYMYSHYN
AU - Sven ACHENBACH
AU - Martin BORNER
AU - Nina DAMBROWSKY
AU - Jurgen MOHR
PY - 2007
DO - 10.1093/ietele/e90-c.12.2192
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E90-C
IS - 12
JA - IEICE TRANSACTIONS on Electronics
Y1 - December 2007
AB - An ultra-deep polymer cavity structure exposed using deep X-ray lithography is used as a template for metal electroforming to produce a 24-GHz cavity resonator. The metal cavity is 1.8 mm deep and has impressive structure, including extremely vertical and smooth sidewalls, resulting in low conductor loss. The measured resonator has an unloaded quality factor of above 1800 at a resonant frequency of 23.89 GHz.
ER -
English
