IEICE TRANSACTIONS on Electronics
Indirectly Reactive Sputtering Coater for High Quality Optical Coatings
Summary :
An indirectly reactive sputtering coater has been developed to deposit various high quality metallic and metal oxide films at high deposition rate. In this letter, several kinds of filters such as antireflection (AR) coating, IR-cut filter, and Rugate filter were deposited for the benchmark test of implemental capabilities. Our coater was established to be a powerful tool for both discrete multilayer and Rugate filters due to high stability and reproducibility of the refractive index and the deposition rate.
- Publication
- IEICE TRANSACTIONS on Electronics Vol.E91-C No.10 pp.1673-1674
- Publication Date
- 2008/10/01
- Publicized
- Online ISSN
- 1745-1353
- DOI
- 10.1093/ietele/e91-c.10.1673
- Type of Manuscript
- Special Section LETTER (Special Section on Functional Thin Films for Optical Applications)
- Category
Authors
Keyword
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Kei-ichi C. NAMIKI, Xinbin CHENG, Haruo TAKAHASHI, "Indirectly Reactive Sputtering Coater for High Quality Optical Coatings" in IEICE TRANSACTIONS on Electronics,
vol. E91-C, no. 10, pp. 1673-1674, October 2008, doi: 10.1093/ietele/e91-c.10.1673.
Abstract: An indirectly reactive sputtering coater has been developed to deposit various high quality metallic and metal oxide films at high deposition rate. In this letter, several kinds of filters such as antireflection (AR) coating, IR-cut filter, and Rugate filter were deposited for the benchmark test of implemental capabilities. Our coater was established to be a powerful tool for both discrete multilayer and Rugate filters due to high stability and reproducibility of the refractive index and the deposition rate.
URL: https://global.ieice.org/en_transactions/electronics/10.1093/ietele/e91-c.10.1673/_p
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@ARTICLE{e91-c_10_1673,
author={Kei-ichi C. NAMIKI, Xinbin CHENG, Haruo TAKAHASHI, },
journal={IEICE TRANSACTIONS on Electronics},
title={Indirectly Reactive Sputtering Coater for High Quality Optical Coatings},
year={2008},
volume={E91-C},
number={10},
pages={1673-1674},
abstract={An indirectly reactive sputtering coater has been developed to deposit various high quality metallic and metal oxide films at high deposition rate. In this letter, several kinds of filters such as antireflection (AR) coating, IR-cut filter, and Rugate filter were deposited for the benchmark test of implemental capabilities. Our coater was established to be a powerful tool for both discrete multilayer and Rugate filters due to high stability and reproducibility of the refractive index and the deposition rate.},
keywords={},
doi={10.1093/ietele/e91-c.10.1673},
ISSN={1745-1353},
month={October},}
Copy
TY - JOUR
TI - Indirectly Reactive Sputtering Coater for High Quality Optical Coatings
T2 - IEICE TRANSACTIONS on Electronics
SP - 1673
EP - 1674
AU - Kei-ichi C. NAMIKI
AU - Xinbin CHENG
AU - Haruo TAKAHASHI
PY - 2008
DO - 10.1093/ietele/e91-c.10.1673
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E91-C
IS - 10
JA - IEICE TRANSACTIONS on Electronics
Y1 - October 2008
AB - An indirectly reactive sputtering coater has been developed to deposit various high quality metallic and metal oxide films at high deposition rate. In this letter, several kinds of filters such as antireflection (AR) coating, IR-cut filter, and Rugate filter were deposited for the benchmark test of implemental capabilities. Our coater was established to be a powerful tool for both discrete multilayer and Rugate filters due to high stability and reproducibility of the refractive index and the deposition rate.
ER -
English
