IEICE TRANSACTIONS on Electronics
Highly-Permissible Alignment Tolerance of Back-Illuminated Photo-Diode Array Attached with a Self-Aligned Micro Ball Lens
Summary :
Simulation and fabrication results on back-illuminated 4-channel photodiode (PD) array with a self-aligned micro ball lens are described. The channel pitch and diameter of each photosensitive area are 250 µm and 40 µm, respectively. Measured photocurrent is 1.92 times larger than that without a lens. Alignment tolerance between the single mode fiber (SMF) optical axis and the photodiode is improved from 21.2 µm to 42.7 µm. Moreover, the separation tolerance between the fiber and the lens is 210.5 µm. These large tolerances agree with simulation results, demonstrating that the device configuration is suitable for receivers for multi-channel inter-connection. Frequency response and inter-channel cross talk are also discussed.
- Publication
- IEICE TRANSACTIONS on Electronics Vol.E91-C No.9 pp.1472-1479
- Publication Date
- 2008/09/01
- Publicized
- Online ISSN
- 1745-1353
- DOI
- 10.1093/ietele/e91-c.9.1472
- Type of Manuscript
- PAPER
- Category
- Lasers, Quantum Electronics
Authors
Keyword
Latest Issue
Copyrights notice of machine-translated contents
The copyright of the original papers published on this site belongs to IEICE. Unauthorized use of the original or translated papers is prohibited. See IEICE Provisions on Copyright for details.
Cite this
Copy
Kazuhiro NISHIDE, Kenji IKEDA, Xueliang SONG, Shurong WANG, Yoshiaki NAKANO, "Highly-Permissible Alignment Tolerance of Back-Illuminated Photo-Diode Array Attached with a Self-Aligned Micro Ball Lens" in IEICE TRANSACTIONS on Electronics,
vol. E91-C, no. 9, pp. 1472-1479, September 2008, doi: 10.1093/ietele/e91-c.9.1472.
Abstract: Simulation and fabrication results on back-illuminated 4-channel photodiode (PD) array with a self-aligned micro ball lens are described. The channel pitch and diameter of each photosensitive area are 250 µm and 40 µm, respectively. Measured photocurrent is 1.92 times larger than that without a lens. Alignment tolerance between the single mode fiber (SMF) optical axis and the photodiode is improved from 21.2 µm to 42.7 µm. Moreover, the separation tolerance between the fiber and the lens is 210.5 µm. These large tolerances agree with simulation results, demonstrating that the device configuration is suitable for receivers for multi-channel inter-connection. Frequency response and inter-channel cross talk are also discussed.
URL: https://global.ieice.org/en_transactions/electronics/10.1093/ietele/e91-c.9.1472/_p
Copy
@ARTICLE{e91-c_9_1472,
author={Kazuhiro NISHIDE, Kenji IKEDA, Xueliang SONG, Shurong WANG, Yoshiaki NAKANO, },
journal={IEICE TRANSACTIONS on Electronics},
title={Highly-Permissible Alignment Tolerance of Back-Illuminated Photo-Diode Array Attached with a Self-Aligned Micro Ball Lens},
year={2008},
volume={E91-C},
number={9},
pages={1472-1479},
abstract={Simulation and fabrication results on back-illuminated 4-channel photodiode (PD) array with a self-aligned micro ball lens are described. The channel pitch and diameter of each photosensitive area are 250 µm and 40 µm, respectively. Measured photocurrent is 1.92 times larger than that without a lens. Alignment tolerance between the single mode fiber (SMF) optical axis and the photodiode is improved from 21.2 µm to 42.7 µm. Moreover, the separation tolerance between the fiber and the lens is 210.5 µm. These large tolerances agree with simulation results, demonstrating that the device configuration is suitable for receivers for multi-channel inter-connection. Frequency response and inter-channel cross talk are also discussed.},
keywords={},
doi={10.1093/ietele/e91-c.9.1472},
ISSN={1745-1353},
month={September},}
Copy
TY - JOUR
TI - Highly-Permissible Alignment Tolerance of Back-Illuminated Photo-Diode Array Attached with a Self-Aligned Micro Ball Lens
T2 - IEICE TRANSACTIONS on Electronics
SP - 1472
EP - 1479
AU - Kazuhiro NISHIDE
AU - Kenji IKEDA
AU - Xueliang SONG
AU - Shurong WANG
AU - Yoshiaki NAKANO
PY - 2008
DO - 10.1093/ietele/e91-c.9.1472
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E91-C
IS - 9
JA - IEICE TRANSACTIONS on Electronics
Y1 - September 2008
AB - Simulation and fabrication results on back-illuminated 4-channel photodiode (PD) array with a self-aligned micro ball lens are described. The channel pitch and diameter of each photosensitive area are 250 µm and 40 µm, respectively. Measured photocurrent is 1.92 times larger than that without a lens. Alignment tolerance between the single mode fiber (SMF) optical axis and the photodiode is improved from 21.2 µm to 42.7 µm. Moreover, the separation tolerance between the fiber and the lens is 210.5 µm. These large tolerances agree with simulation results, demonstrating that the device configuration is suitable for receivers for multi-channel inter-connection. Frequency response and inter-channel cross talk are also discussed.
ER -
English
