A Study on the Oxidation State of Bi-layered Anodized Films
Summary :
We have studied the oxidation state of Al/Hf and Ta/Hf bi-layered films by AES/XPS analysis. The anion transport process through the upper oxidized layer which is oxygen supply medium for Hf oxidation is examined. It is found that the oxidation reaction of Hf occurring with sufficient anion transport through the upper oxidized layer corresponds to the excellent properties as capacitors.
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- IEICE TRANSACTIONS on Electronics Vol.E74-C No.10 pp.3357-3359
- Publication Date
- 1991/10/25
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- LETTER
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Tsuyoshi DOBASHI, Toshiji UMEZAWA, Katsutaka SASAKI, Atsushi NOYA, "A Study on the Oxidation State of Bi-layered Anodized Films" in IEICE TRANSACTIONS on Electronics,
vol. E74-C, no. 10, pp. 3357-3359, October 1991, doi: .
Abstract: We have studied the oxidation state of Al/Hf and Ta/Hf bi-layered films by AES/XPS analysis. The anion transport process through the upper oxidized layer which is oxygen supply medium for Hf oxidation is examined. It is found that the oxidation reaction of Hf occurring with sufficient anion transport through the upper oxidized layer corresponds to the excellent properties as capacitors.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e74-c_10_3357/_p
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@ARTICLE{e74-c_10_3357,
author={Tsuyoshi DOBASHI, Toshiji UMEZAWA, Katsutaka SASAKI, Atsushi NOYA, },
journal={IEICE TRANSACTIONS on Electronics},
title={A Study on the Oxidation State of Bi-layered Anodized Films},
year={1991},
volume={E74-C},
number={10},
pages={3357-3359},
abstract={We have studied the oxidation state of Al/Hf and Ta/Hf bi-layered films by AES/XPS analysis. The anion transport process through the upper oxidized layer which is oxygen supply medium for Hf oxidation is examined. It is found that the oxidation reaction of Hf occurring with sufficient anion transport through the upper oxidized layer corresponds to the excellent properties as capacitors.},
keywords={},
doi={},
ISSN={},
month={October},}
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TY - JOUR
TI - A Study on the Oxidation State of Bi-layered Anodized Films
T2 - IEICE TRANSACTIONS on Electronics
SP - 3357
EP - 3359
AU - Tsuyoshi DOBASHI
AU - Toshiji UMEZAWA
AU - Katsutaka SASAKI
AU - Atsushi NOYA
PY - 1991
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E74-C
IS - 10
JA - IEICE TRANSACTIONS on Electronics
Y1 - October 1991
AB - We have studied the oxidation state of Al/Hf and Ta/Hf bi-layered films by AES/XPS analysis. The anion transport process through the upper oxidized layer which is oxygen supply medium for Hf oxidation is examined. It is found that the oxidation reaction of Hf occurring with sufficient anion transport through the upper oxidized layer corresponds to the excellent properties as capacitors.
ER -
English
