IEICE TRANSACTIONS on Electronics
Comparison of Coordinate Transformation Methods for Two-Dimensional Process Simulator
Summary :
A two-dimensional process simulator using the coordinate transformation method has been developed. Four transformation methods are compared by solving a diffusion equation; that is (1) boundary-fitted coordinate transformation solving the Poisson's equations with an orthogonal boundary condition, (2) boundary-fitted coordinate transformation solving the Poisson's equations with a fixed boundary condition, (3) vertical coordinate transformation, and (4) parameter mapping coordinate transformation. It has been found that the total calculation time to transform the coordinates and to solve the diffusion equation is very small by the last two methods (3) and (4).
- Publication
- IEICE TRANSACTIONS on Electronics Vol.E74-C No.6 pp.1672-1676
- Publication Date
- 1991/06/25
- Publicized
- Online ISSN
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- Type of Manuscript
- Special Section PAPER (Special Issue on Device and Process Simulation for Ultra Large Scale Integration)
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Noritoshi KONISHI, Mitsutoshi NAKAMURA, "Comparison of Coordinate Transformation Methods for Two-Dimensional Process Simulator" in IEICE TRANSACTIONS on Electronics,
vol. E74-C, no. 6, pp. 1672-1676, June 1991, doi: .
Abstract: A two-dimensional process simulator using the coordinate transformation method has been developed. Four transformation methods are compared by solving a diffusion equation; that is (1) boundary-fitted coordinate transformation solving the Poisson's equations with an orthogonal boundary condition, (2) boundary-fitted coordinate transformation solving the Poisson's equations with a fixed boundary condition, (3) vertical coordinate transformation, and (4) parameter mapping coordinate transformation. It has been found that the total calculation time to transform the coordinates and to solve the diffusion equation is very small by the last two methods (3) and (4).
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e74-c_6_1672/_p
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@ARTICLE{e74-c_6_1672,
author={Noritoshi KONISHI, Mitsutoshi NAKAMURA, },
journal={IEICE TRANSACTIONS on Electronics},
title={Comparison of Coordinate Transformation Methods for Two-Dimensional Process Simulator},
year={1991},
volume={E74-C},
number={6},
pages={1672-1676},
abstract={A two-dimensional process simulator using the coordinate transformation method has been developed. Four transformation methods are compared by solving a diffusion equation; that is (1) boundary-fitted coordinate transformation solving the Poisson's equations with an orthogonal boundary condition, (2) boundary-fitted coordinate transformation solving the Poisson's equations with a fixed boundary condition, (3) vertical coordinate transformation, and (4) parameter mapping coordinate transformation. It has been found that the total calculation time to transform the coordinates and to solve the diffusion equation is very small by the last two methods (3) and (4).},
keywords={},
doi={},
ISSN={},
month={June},}
Copy
TY - JOUR
TI - Comparison of Coordinate Transformation Methods for Two-Dimensional Process Simulator
T2 - IEICE TRANSACTIONS on Electronics
SP - 1672
EP - 1676
AU - Noritoshi KONISHI
AU - Mitsutoshi NAKAMURA
PY - 1991
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E74-C
IS - 6
JA - IEICE TRANSACTIONS on Electronics
Y1 - June 1991
AB - A two-dimensional process simulator using the coordinate transformation method has been developed. Four transformation methods are compared by solving a diffusion equation; that is (1) boundary-fitted coordinate transformation solving the Poisson's equations with an orthogonal boundary condition, (2) boundary-fitted coordinate transformation solving the Poisson's equations with a fixed boundary condition, (3) vertical coordinate transformation, and (4) parameter mapping coordinate transformation. It has been found that the total calculation time to transform the coordinates and to solve the diffusion equation is very small by the last two methods (3) and (4).
ER -
English
