It is necessery to investigate the buckling mechanism in order to obtaining good performance from various sensors composed of resistors and microbridges or membranes. Especially for flow sensors, a convex formed bridge has an advantage over a flat or concave bridge with respect to heat transfer coefficient. We have fabricated various shapes of bridges and have prepared SiNx sputtered films as the support films of microbridges and Pt sputtered or evaporated films as resistors. We have achieved deformation control for both the longitudinal axis and transverse axis of Pt/SiNx double layered microbridges by appropriate selection of the total residual stress of Pt/SiNx structures and of the stress gradient between the Pt film and SiNx film. The deformation direction of the longitudinal axis of bridges for the beam bridge (Type
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Motohisa TAGUCHI, Kaoru KAWATA, Tsukasa MATSUURA, Kazuhiko TSUTSUMI, "Deformation Control of Metal/Nitride Microbridges" in IEICE TRANSACTIONS on Electronics,
vol. E80-C, no. 2, pp. 221-225, February 1997, doi: .
Abstract: It is necessery to investigate the buckling mechanism in order to obtaining good performance from various sensors composed of resistors and microbridges or membranes. Especially for flow sensors, a convex formed bridge has an advantage over a flat or concave bridge with respect to heat transfer coefficient. We have fabricated various shapes of bridges and have prepared SiNx sputtered films as the support films of microbridges and Pt sputtered or evaporated films as resistors. We have achieved deformation control for both the longitudinal axis and transverse axis of Pt/SiNx double layered microbridges by appropriate selection of the total residual stress of Pt/SiNx structures and of the stress gradient between the Pt film and SiNx film. The deformation direction of the longitudinal axis of bridges for the beam bridge (Type
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e80-c_2_221/_p
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@ARTICLE{e80-c_2_221,
author={Motohisa TAGUCHI, Kaoru KAWATA, Tsukasa MATSUURA, Kazuhiko TSUTSUMI, },
journal={IEICE TRANSACTIONS on Electronics},
title={Deformation Control of Metal/Nitride Microbridges},
year={1997},
volume={E80-C},
number={2},
pages={221-225},
abstract={It is necessery to investigate the buckling mechanism in order to obtaining good performance from various sensors composed of resistors and microbridges or membranes. Especially for flow sensors, a convex formed bridge has an advantage over a flat or concave bridge with respect to heat transfer coefficient. We have fabricated various shapes of bridges and have prepared SiNx sputtered films as the support films of microbridges and Pt sputtered or evaporated films as resistors. We have achieved deformation control for both the longitudinal axis and transverse axis of Pt/SiNx double layered microbridges by appropriate selection of the total residual stress of Pt/SiNx structures and of the stress gradient between the Pt film and SiNx film. The deformation direction of the longitudinal axis of bridges for the beam bridge (Type
keywords={},
doi={},
ISSN={},
month={February},}
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TY - JOUR
TI - Deformation Control of Metal/Nitride Microbridges
T2 - IEICE TRANSACTIONS on Electronics
SP - 221
EP - 225
AU - Motohisa TAGUCHI
AU - Kaoru KAWATA
AU - Tsukasa MATSUURA
AU - Kazuhiko TSUTSUMI
PY - 1997
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E80-C
IS - 2
JA - IEICE TRANSACTIONS on Electronics
Y1 - February 1997
AB - It is necessery to investigate the buckling mechanism in order to obtaining good performance from various sensors composed of resistors and microbridges or membranes. Especially for flow sensors, a convex formed bridge has an advantage over a flat or concave bridge with respect to heat transfer coefficient. We have fabricated various shapes of bridges and have prepared SiNx sputtered films as the support films of microbridges and Pt sputtered or evaporated films as resistors. We have achieved deformation control for both the longitudinal axis and transverse axis of Pt/SiNx double layered microbridges by appropriate selection of the total residual stress of Pt/SiNx structures and of the stress gradient between the Pt film and SiNx film. The deformation direction of the longitudinal axis of bridges for the beam bridge (Type
ER -