IEICE TRANSACTIONS on Electronics
Optical MEMS
Summary :
Recently the applications of MEMS (micro electro mechanical systems) have made remarkable progress in many filelds. The optical application of MEMS is one of the most promising because it provides micro mechano optical devices, the key components for high-perfromance systems in optical communication networks and data storage devices. This paper disucces the impacts of MEMS techologies on optical systems. Furthermore, state-of-the-art exmaples of micro optical switches, pig-tailed tunable filters and two-dimensional MEMS optical scanners are described.
- Publication
- IEICE TRANSACTIONS on Electronics Vol.E83-C No.9 pp.1427-1434
- Publication Date
- 2000/09/25
- Publicized
- Online ISSN
- DOI
- Type of Manuscript
- Special Section INVITED PAPER (Special Issue on Current Electromechanical Devices and Their Materials with Recent Innovations)
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Hiroyuki FUJITA, Hiroshi TOSHIYOSHI, "Optical MEMS" in IEICE TRANSACTIONS on Electronics,
vol. E83-C, no. 9, pp. 1427-1434, September 2000, doi: .
Abstract: Recently the applications of MEMS (micro electro mechanical systems) have made remarkable progress in many filelds. The optical application of MEMS is one of the most promising because it provides micro mechano optical devices, the key components for high-perfromance systems in optical communication networks and data storage devices. This paper disucces the impacts of MEMS techologies on optical systems. Furthermore, state-of-the-art exmaples of micro optical switches, pig-tailed tunable filters and two-dimensional MEMS optical scanners are described.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e83-c_9_1427/_p
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@ARTICLE{e83-c_9_1427,
author={Hiroyuki FUJITA, Hiroshi TOSHIYOSHI, },
journal={IEICE TRANSACTIONS on Electronics},
title={Optical MEMS},
year={2000},
volume={E83-C},
number={9},
pages={1427-1434},
abstract={Recently the applications of MEMS (micro electro mechanical systems) have made remarkable progress in many filelds. The optical application of MEMS is one of the most promising because it provides micro mechano optical devices, the key components for high-perfromance systems in optical communication networks and data storage devices. This paper disucces the impacts of MEMS techologies on optical systems. Furthermore, state-of-the-art exmaples of micro optical switches, pig-tailed tunable filters and two-dimensional MEMS optical scanners are described.},
keywords={},
doi={},
ISSN={},
month={September},}
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TY - JOUR
TI - Optical MEMS
T2 - IEICE TRANSACTIONS on Electronics
SP - 1427
EP - 1434
AU - Hiroyuki FUJITA
AU - Hiroshi TOSHIYOSHI
PY - 2000
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E83-C
IS - 9
JA - IEICE TRANSACTIONS on Electronics
Y1 - September 2000
AB - Recently the applications of MEMS (micro electro mechanical systems) have made remarkable progress in many filelds. The optical application of MEMS is one of the most promising because it provides micro mechano optical devices, the key components for high-perfromance systems in optical communication networks and data storage devices. This paper disucces the impacts of MEMS techologies on optical systems. Furthermore, state-of-the-art exmaples of micro optical switches, pig-tailed tunable filters and two-dimensional MEMS optical scanners are described.
ER -
English
