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Application of a Digital Scanning Laser Microscope to 3-D Analysis of Contact Surface Damages

Makoto HASEGAWA, Jiro MAKIMOTO, Koichiro SAWA

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Summary :

The authors have been interested in a Scanning Laser Microscope (SLM) and applied it to studies of contact phenomena. In particular, a digital SLM is being currently used, and confirmed to be a successful tool for investigating the contact phenomena. In this paper, the theory and mechanism of a digital SLM are briefly explained, and some actual data obtained with the digital SLM are presented for demonstrating its usefulness for studies of contact phenomena.

Publication
IEICE TRANSACTIONS on Electronics Vol.E86-C No.6 pp.932-938
Publication Date
2003/06/01
Publicized
Online ISSN
DOI
Type of Manuscript
Special Section PAPER (Special Issue on Recent Development of Electro-Mechanical Devices (IS-EMD 2002))
Category
Discharges & Related Phenomena

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