The 3D Measurement and Analysis of High Precision Surfaces Using Con-Focal Optical Methods
Summary :
The paper reviews methods for the measurement and analysis of high precision surfaces. A number of measurement techniques are discussed with the emphasis on the application of con-focal methods. The various techniques are compared in terms of measurement times, data density, and the ability to detect near vertical surfaces, and steps. The two sensing methods discussed are the auto-focus laser method and the white light methods. Particular applications considered are in the measurement of eroded electrical contact surfaces, spherical and near spherical surfaces, and MEMS. The particular emphasis here is on the metrology of such surfaces and devices and methods for the assessment of complex micro-machined surfaces. The paper points to a number of directions for improved metrology and discusses these in the context of the application given.
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- IEICE TRANSACTIONS on Electronics Vol.E87-C No.8 pp.1261-1267
- Publication Date
- 2004/08/01
- Publicized
- Online ISSN
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- Type of Manuscript
- Special Section INVITED PAPER (Special Section on IS-EMD2003--Recent Technical Trend of Electro-Mechanical Devices)
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John McBRIDE, Christian MAUL, "The 3D Measurement and Analysis of High Precision Surfaces Using Con-Focal Optical Methods" in IEICE TRANSACTIONS on Electronics,
vol. E87-C, no. 8, pp. 1261-1267, August 2004, doi: .
Abstract: The paper reviews methods for the measurement and analysis of high precision surfaces. A number of measurement techniques are discussed with the emphasis on the application of con-focal methods. The various techniques are compared in terms of measurement times, data density, and the ability to detect near vertical surfaces, and steps. The two sensing methods discussed are the auto-focus laser method and the white light methods. Particular applications considered are in the measurement of eroded electrical contact surfaces, spherical and near spherical surfaces, and MEMS. The particular emphasis here is on the metrology of such surfaces and devices and methods for the assessment of complex micro-machined surfaces. The paper points to a number of directions for improved metrology and discusses these in the context of the application given.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e87-c_8_1261/_p
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@ARTICLE{e87-c_8_1261,
author={John McBRIDE, Christian MAUL, },
journal={IEICE TRANSACTIONS on Electronics},
title={The 3D Measurement and Analysis of High Precision Surfaces Using Con-Focal Optical Methods},
year={2004},
volume={E87-C},
number={8},
pages={1261-1267},
abstract={The paper reviews methods for the measurement and analysis of high precision surfaces. A number of measurement techniques are discussed with the emphasis on the application of con-focal methods. The various techniques are compared in terms of measurement times, data density, and the ability to detect near vertical surfaces, and steps. The two sensing methods discussed are the auto-focus laser method and the white light methods. Particular applications considered are in the measurement of eroded electrical contact surfaces, spherical and near spherical surfaces, and MEMS. The particular emphasis here is on the metrology of such surfaces and devices and methods for the assessment of complex micro-machined surfaces. The paper points to a number of directions for improved metrology and discusses these in the context of the application given.},
keywords={},
doi={},
ISSN={},
month={August},}
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TY - JOUR
TI - The 3D Measurement and Analysis of High Precision Surfaces Using Con-Focal Optical Methods
T2 - IEICE TRANSACTIONS on Electronics
SP - 1261
EP - 1267
AU - John McBRIDE
AU - Christian MAUL
PY - 2004
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E87-C
IS - 8
JA - IEICE TRANSACTIONS on Electronics
Y1 - August 2004
AB - The paper reviews methods for the measurement and analysis of high precision surfaces. A number of measurement techniques are discussed with the emphasis on the application of con-focal methods. The various techniques are compared in terms of measurement times, data density, and the ability to detect near vertical surfaces, and steps. The two sensing methods discussed are the auto-focus laser method and the white light methods. Particular applications considered are in the measurement of eroded electrical contact surfaces, spherical and near spherical surfaces, and MEMS. The particular emphasis here is on the metrology of such surfaces and devices and methods for the assessment of complex micro-machined surfaces. The paper points to a number of directions for improved metrology and discusses these in the context of the application given.
ER -
English
