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Transition Edge Sensor-Energy Dispersive Spectrometer (TES-EDS) and Its Applications
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The Transition Edge Sensor (TES)-Energy Dispersive Spectrometer (EDS) is an X-ray detector with high-energy resolution (12.8 eV). The TES can be mounted to a scanning electron microscope (SEM). The TES-EDS is based on a cryogen-free dilution refrigerator. The high-energy resolution enables analysis of the distribution of various elements in samples under low acceleration voltage (typically under 5 keV) by using K-lines of light elements and M lines of heavy elements. For example, the energy of the arsenic L line differs from the magnesium K line by 28 eV. When used to analyze the spore of the Pteris vittata L plant, the TES-EDS clearly reveals a different distribution of As and Mg in the micro region of the plant. The TES-EDS with SEM yields detailed information about the distribution of multi-elements in a sample.
- Publication
- IEICE TRANSACTIONS on Electronics Vol.E92-C No.3 pp.334-340
- Publication Date
- 2009/03/01
- Publicized
- Online ISSN
- 1745-1353
- DOI
- 10.1587/transele.E92.C.334
- Type of Manuscript
- Special Section INVITED PAPER (Special Section on Recent Progress in Superconducting Analog Devices and Their Applications)
- Category
Authors
Keiichi TANAKA
Akikazu ODAWARA
Atsushi NAGATA
Yukari BABA
Satoshi NAKAYAMA
Shigenori AIDA
Toshimitsu MOROOKA
Yoshikazu HOMMA
Izumi NAKAI
Kazuo CHINONE
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Keiichi TANAKA, Akikazu ODAWARA, Atsushi NAGATA, Yukari BABA, Satoshi NAKAYAMA, Shigenori AIDA, Toshimitsu MOROOKA, Yoshikazu HOMMA, Izumi NAKAI, Kazuo CHINONE, "Transition Edge Sensor-Energy Dispersive Spectrometer (TES-EDS) and Its Applications" in IEICE TRANSACTIONS on Electronics,
vol. E92-C, no. 3, pp. 334-340, March 2009, doi: 10.1587/transele.E92.C.334.
Abstract: The Transition Edge Sensor (TES)-Energy Dispersive Spectrometer (EDS) is an X-ray detector with high-energy resolution (12.8 eV). The TES can be mounted to a scanning electron microscope (SEM). The TES-EDS is based on a cryogen-free dilution refrigerator. The high-energy resolution enables analysis of the distribution of various elements in samples under low acceleration voltage (typically under 5 keV) by using K-lines of light elements and M lines of heavy elements. For example, the energy of the arsenic L line differs from the magnesium K line by 28 eV. When used to analyze the spore of the Pteris vittata L plant, the TES-EDS clearly reveals a different distribution of As and Mg in the micro region of the plant. The TES-EDS with SEM yields detailed information about the distribution of multi-elements in a sample.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/transele.E92.C.334/_p
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@ARTICLE{e92-c_3_334,
author={Keiichi TANAKA, Akikazu ODAWARA, Atsushi NAGATA, Yukari BABA, Satoshi NAKAYAMA, Shigenori AIDA, Toshimitsu MOROOKA, Yoshikazu HOMMA, Izumi NAKAI, Kazuo CHINONE, },
journal={IEICE TRANSACTIONS on Electronics},
title={Transition Edge Sensor-Energy Dispersive Spectrometer (TES-EDS) and Its Applications},
year={2009},
volume={E92-C},
number={3},
pages={334-340},
abstract={The Transition Edge Sensor (TES)-Energy Dispersive Spectrometer (EDS) is an X-ray detector with high-energy resolution (12.8 eV). The TES can be mounted to a scanning electron microscope (SEM). The TES-EDS is based on a cryogen-free dilution refrigerator. The high-energy resolution enables analysis of the distribution of various elements in samples under low acceleration voltage (typically under 5 keV) by using K-lines of light elements and M lines of heavy elements. For example, the energy of the arsenic L line differs from the magnesium K line by 28 eV. When used to analyze the spore of the Pteris vittata L plant, the TES-EDS clearly reveals a different distribution of As and Mg in the micro region of the plant. The TES-EDS with SEM yields detailed information about the distribution of multi-elements in a sample.},
keywords={},
doi={10.1587/transele.E92.C.334},
ISSN={1745-1353},
month={March},}
Copy
TY - JOUR
TI - Transition Edge Sensor-Energy Dispersive Spectrometer (TES-EDS) and Its Applications
T2 - IEICE TRANSACTIONS on Electronics
SP - 334
EP - 340
AU - Keiichi TANAKA
AU - Akikazu ODAWARA
AU - Atsushi NAGATA
AU - Yukari BABA
AU - Satoshi NAKAYAMA
AU - Shigenori AIDA
AU - Toshimitsu MOROOKA
AU - Yoshikazu HOMMA
AU - Izumi NAKAI
AU - Kazuo CHINONE
PY - 2009
DO - 10.1587/transele.E92.C.334
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E92-C
IS - 3
JA - IEICE TRANSACTIONS on Electronics
Y1 - March 2009
AB - The Transition Edge Sensor (TES)-Energy Dispersive Spectrometer (EDS) is an X-ray detector with high-energy resolution (12.8 eV). The TES can be mounted to a scanning electron microscope (SEM). The TES-EDS is based on a cryogen-free dilution refrigerator. The high-energy resolution enables analysis of the distribution of various elements in samples under low acceleration voltage (typically under 5 keV) by using K-lines of light elements and M lines of heavy elements. For example, the energy of the arsenic L line differs from the magnesium K line by 28 eV. When used to analyze the spore of the Pteris vittata L plant, the TES-EDS clearly reveals a different distribution of As and Mg in the micro region of the plant. The TES-EDS with SEM yields detailed information about the distribution of multi-elements in a sample.
ER -
English
