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Open Access
Al-Based Metal Mesh Electrodes for Advanced Touch Screen Panels Using Aluminum Nitride System Optical Absorption Layer

Mototaka OCHI, Yoko SHIDA, Hiroyuki OKUNO, Hiroshi GOTO, Toshihiro KUGIMIYA, Moriyoshi KANAMARU

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Summary :

An Al-N system optical absorption layer has been developed, to be used for Al-based metal mesh electrodes on touch screen panels. The triple-layered electrode effectively suppresses the optical reflection in both visible light and the blue color region and exhibits excellent wet etching property that accommodates micro-fabrication. Due to its high noise immunity and contact sensitivity originating from its low electrical resistivity, the proposed metal mesh electrodes are useful for touch-sensitive panels in the next generation ultra-high-resolution displays.

Publication
IEICE TRANSACTIONS on Electronics Vol.E98-C No.11 pp.1000-1007
Publication Date
2015/11/01
Publicized
Online ISSN
1745-1353
DOI
10.1587/transele.E98.C.1000
Type of Manuscript
Special Section INVITED PAPER (Special Section on Electronic Displays)
Category

Authors

Mototaka OCHI
  Kobe Steel Ltd.
Yoko SHIDA
  Kobe Steel Ltd.
Hiroyuki OKUNO
  Kobelco Research Institute Inc.
Hiroshi GOTO
  Kobe Steel Ltd.
Toshihiro KUGIMIYA
  Kobe Steel Ltd.
Moriyoshi KANAMARU
  Kobelco Research Institute Inc.

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