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Fault Diagnosis Technique for Yield Enhancement of Logic LSI Using IDDQ

Masaru SANADA, Hiromu FUJIOKA

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Summary :

Abnormal IDDQ (Quiescent VDD supply current) indicates the existence of physical damage in a circuit. Using this phenomenon, a CAD-based fault diagnosis technology has been developed to analyze the manufacturing yield of logic LSI. This method to detect the fatal defect fragments in several abnormalities identified with wafer inspection apparatus includes a way to separate various leakage faults, and to define the diagnosis area encircling the abnormal portions. The proposed technique progressively narrows the faulty area by using logic simulation to extract the logic states of the diagnosis area, and by locating test vectors related to abnormal IDDQ. The fundamental diagnosis way employs the comparative operation of each circuit element to determine whether the same logic state with abnormal IDDQ exists in normal logic state or not.

Publication
IEICE TRANSACTIONS on Fundamentals Vol.E83-A No.5 pp.842-850
Publication Date
2000/05/25
Publicized
Online ISSN
DOI
Type of Manuscript
Special Section PAPER (Special Section on Reliability Theory and Its Applications)
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