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[Author] Akio MISAKA(1hit)

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  • A Design Hierarchy of IC Interconnects and Gate Patterns

    Shinji ODANAKA  Akio MISAKA  Kyoji YAMASHITA  

     
    INVITED PAPER

      Vol:
    E82-C No:6
      Page(s):
    948-954

    A new design hierarchy in TCAD is discussed with emphasis on a design of IC interconnects and gate patterns. Two design methodologies for gate patterns at a CMOS cell level and multilevel interconnect scheme at a chip level are proposed. This approach generates the layout design rules of gate patterns, considering the fabrication process and pattern layout dependency, and allows a design of multilevel interconnect scheme at the initial phase of technology development.