1-1hit |
Shinji ODANAKA Akio MISAKA Kyoji YAMASHITA
A new design hierarchy in TCAD is discussed with emphasis on a design of IC interconnects and gate patterns. Two design methodologies for gate patterns at a CMOS cell level and multilevel interconnect scheme at a chip level are proposed. This approach generates the layout design rules of gate patterns, considering the fabrication process and pattern layout dependency, and allows a design of multilevel interconnect scheme at the initial phase of technology development.