10-Gbit/s monolithic receiver OEIC's for 1.55-µm optical transmission systems were fabricated using a stacked layer structure of p-i-n photodiodes and HEMT's grown on InP substrates by single-step MOVPE. A receiver OEIC with a large O/E conversion factor was obtained by adding a three-stage differential amplifier to a conventional feedback amplifier monolithically integrated with a surface-illuminated p-i-n photodiode. The circuit configuration gave a preamplifier a transimpedance of 60 dBΩ. The receiver OEIC achieved error-free operation at 10 Gbit/s without a postamplifier even with the optical input as low as -10.3 dBm because of its large O/E conversion factor of 890 V/W. A two-channel receiver OEIC array for use in a 10-Gbit/s parallel photoreceiver module based on a PLC platform was made by monolithically integrating multimode WGPD's with HEMT preamplifiers. The side-illuminated structure of the WGPD is suitable for integration with other waveguide-type optical devices. The receiver OEIC arrays were fabricated on a 2-inch wafer with achieving excellent uniformity and a yield over 90%: average transimpedance and average 3-dB-down bandwidth were 43.8 dBΩ and 8.0 GHz. The two channels in the receiver OEIC array also showed sensitivities of -16.1 dBm and -15.3 dBm at 10 Gbit/s. The two-channel photoreceiver module was constructed by assembling the OEIC array on a PLC platform. The frequency response of the module was almost the same as that of the OEIC chip and the crosstalk between channels in the module was better than -27 dB in the frequency range below 6 GHz. These results demonstrate the feasibility of using our receiver OEIC's in various types of optical receiver systems.

We show the design of the bandwidth and the external quantum efficiency (including the coupling efficency to a single-mode fiber) of p-i-n photodetectors. Based on their design procedures, the performance limits of both conventional surface-illuminated photodetectors and side-illuminated photodetectors are evaluated. We point out that in the ultrawide-band region, optical waveguide photodetectors have great advantages over conventional surface-illuminated photodetectors in terms of the product of the bandwidth and the external quantum efficiency. It is shown that a 100-GHz bandwidth can be achieved with little degradation of the external quantum efficiency by a multimode waveguide photodetector structure. We also present a design concept for overcoming the performance limits of solitary waveguide photodetectors by including an input tapered optical waveguide.