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Eisuke ARAI Shinji NAKAMURA Tetsuma SAKURAI Ayano KOJIMA
We propose a method for configuring LSI manufacturing lines so that they can not only be used to manufacture low-cost LSIs in bulk quantities but also can be used to manufacture small lots with ultra-short TAT. This is achieved by adding a relatively small amount of single-wafer processing equipment to a existing conventional processing line, and therefore involves minimum investment.