Configuration of a Manufacturing Line for Mixed Production of Ultra-Short TAT LSIs and Low-Cost LSIs
Summary :
We propose a method for configuring LSI manufacturing lines so that they can not only be used to manufacture low-cost LSIs in bulk quantities but also can be used to manufacture small lots with ultra-short TAT. This is achieved by adding a relatively small amount of single-wafer processing equipment to a existing conventional processing line, and therefore involves minimum investment.
- Publication
- IEICE TRANSACTIONS on Electronics Vol.E78-C No.3 pp.214-221
- Publication Date
- 1995/03/25
- Publicized
- Online ISSN
- DOI
- Type of Manuscript
- Special Section PAPER (Special Issue on Sub-1/4 Micron Device and Process Technologies)
- Category
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Eisuke ARAI, Shinji NAKAMURA, Tetsuma SAKURAI, Ayano KOJIMA, "Configuration of a Manufacturing Line for Mixed Production of Ultra-Short TAT LSIs and Low-Cost LSIs" in IEICE TRANSACTIONS on Electronics,
vol. E78-C, no. 3, pp. 214-221, March 1995, doi: .
Abstract: We propose a method for configuring LSI manufacturing lines so that they can not only be used to manufacture low-cost LSIs in bulk quantities but also can be used to manufacture small lots with ultra-short TAT. This is achieved by adding a relatively small amount of single-wafer processing equipment to a existing conventional processing line, and therefore involves minimum investment.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e78-c_3_214/_p
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@ARTICLE{e78-c_3_214,
author={Eisuke ARAI, Shinji NAKAMURA, Tetsuma SAKURAI, Ayano KOJIMA, },
journal={IEICE TRANSACTIONS on Electronics},
title={Configuration of a Manufacturing Line for Mixed Production of Ultra-Short TAT LSIs and Low-Cost LSIs},
year={1995},
volume={E78-C},
number={3},
pages={214-221},
abstract={We propose a method for configuring LSI manufacturing lines so that they can not only be used to manufacture low-cost LSIs in bulk quantities but also can be used to manufacture small lots with ultra-short TAT. This is achieved by adding a relatively small amount of single-wafer processing equipment to a existing conventional processing line, and therefore involves minimum investment.},
keywords={},
doi={},
ISSN={},
month={March},}
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TY - JOUR
TI - Configuration of a Manufacturing Line for Mixed Production of Ultra-Short TAT LSIs and Low-Cost LSIs
T2 - IEICE TRANSACTIONS on Electronics
SP - 214
EP - 221
AU - Eisuke ARAI
AU - Shinji NAKAMURA
AU - Tetsuma SAKURAI
AU - Ayano KOJIMA
PY - 1995
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E78-C
IS - 3
JA - IEICE TRANSACTIONS on Electronics
Y1 - March 1995
AB - We propose a method for configuring LSI manufacturing lines so that they can not only be used to manufacture low-cost LSIs in bulk quantities but also can be used to manufacture small lots with ultra-short TAT. This is achieved by adding a relatively small amount of single-wafer processing equipment to a existing conventional processing line, and therefore involves minimum investment.
ER -
English
