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Yuichi HAMAMURA Chizu MATSUMOTO Yoshiyuki TSUNODA Koji KAMODA Yoshio IWATA Kenji KANAMITSU Daisuke FUJIKI Fujihiko KOJIKA Hiromi FUJITA Yasuo NAKAGAWA Shun'ichi KANEKO
To improve product yield in high-product-mix semiconductor manufacturing, it is important to estimate the systematic yield inherent to each product and to extract problematic products that have low systematic yields. We propose a simplified and available yield model using a critical area analysis. This model enables the extraction of problematic products by the relationship between actual yields and the short sensitivities of the products. Furthermore, we present an enterprise-wide yield management system using this model and some useful applications. As a result, the system increases the efficiency of the yield management and enhancement dramatically.