Development of an Enterprise-Wide Yield Management System Using Critical Area Analysis for High-Product-Mix Semiconductor Manufacturing
Summary :
To improve product yield in high-product-mix semiconductor manufacturing, it is important to estimate the systematic yield inherent to each product and to extract problematic products that have low systematic yields. We propose a simplified and available yield model using a critical area analysis. This model enables the extraction of problematic products by the relationship between actual yields and the short sensitivities of the products. Furthermore, we present an enterprise-wide yield management system using this model and some useful applications. As a result, the system increases the efficiency of the yield management and enhancement dramatically.
- Publication
- IEICE TRANSACTIONS on Electronics Vol.E92-C No.1 pp.144-152
- Publication Date
- 2009/01/01
- Publicized
- Online ISSN
- 1745-1353
- DOI
- 10.1587/transele.E92.C.144
- Type of Manuscript
- PAPER
- Category
- Semiconductor Materials and Devices
Authors
Yuichi HAMAMURA
Chizu MATSUMOTO
Yoshiyuki TSUNODA
Koji KAMODA
Yoshio IWATA
Kenji KANAMITSU
Daisuke FUJIKI
Fujihiko KOJIKA
Hiromi FUJITA
Yasuo NAKAGAWA
Shun'ichi KANEKO
Keyword
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Yuichi HAMAMURA, Chizu MATSUMOTO, Yoshiyuki TSUNODA, Koji KAMODA, Yoshio IWATA, Kenji KANAMITSU, Daisuke FUJIKI, Fujihiko KOJIKA, Hiromi FUJITA, Yasuo NAKAGAWA, Shun'ichi KANEKO, "Development of an Enterprise-Wide Yield Management System Using Critical Area Analysis for High-Product-Mix Semiconductor Manufacturing" in IEICE TRANSACTIONS on Electronics,
vol. E92-C, no. 1, pp. 144-152, January 2009, doi: 10.1587/transele.E92.C.144.
Abstract: To improve product yield in high-product-mix semiconductor manufacturing, it is important to estimate the systematic yield inherent to each product and to extract problematic products that have low systematic yields. We propose a simplified and available yield model using a critical area analysis. This model enables the extraction of problematic products by the relationship between actual yields and the short sensitivities of the products. Furthermore, we present an enterprise-wide yield management system using this model and some useful applications. As a result, the system increases the efficiency of the yield management and enhancement dramatically.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/transele.E92.C.144/_p
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@ARTICLE{e92-c_1_144,
author={Yuichi HAMAMURA, Chizu MATSUMOTO, Yoshiyuki TSUNODA, Koji KAMODA, Yoshio IWATA, Kenji KANAMITSU, Daisuke FUJIKI, Fujihiko KOJIKA, Hiromi FUJITA, Yasuo NAKAGAWA, Shun'ichi KANEKO, },
journal={IEICE TRANSACTIONS on Electronics},
title={Development of an Enterprise-Wide Yield Management System Using Critical Area Analysis for High-Product-Mix Semiconductor Manufacturing},
year={2009},
volume={E92-C},
number={1},
pages={144-152},
abstract={To improve product yield in high-product-mix semiconductor manufacturing, it is important to estimate the systematic yield inherent to each product and to extract problematic products that have low systematic yields. We propose a simplified and available yield model using a critical area analysis. This model enables the extraction of problematic products by the relationship between actual yields and the short sensitivities of the products. Furthermore, we present an enterprise-wide yield management system using this model and some useful applications. As a result, the system increases the efficiency of the yield management and enhancement dramatically.},
keywords={},
doi={10.1587/transele.E92.C.144},
ISSN={1745-1353},
month={January},}
Copy
TY - JOUR
TI - Development of an Enterprise-Wide Yield Management System Using Critical Area Analysis for High-Product-Mix Semiconductor Manufacturing
T2 - IEICE TRANSACTIONS on Electronics
SP - 144
EP - 152
AU - Yuichi HAMAMURA
AU - Chizu MATSUMOTO
AU - Yoshiyuki TSUNODA
AU - Koji KAMODA
AU - Yoshio IWATA
AU - Kenji KANAMITSU
AU - Daisuke FUJIKI
AU - Fujihiko KOJIKA
AU - Hiromi FUJITA
AU - Yasuo NAKAGAWA
AU - Shun'ichi KANEKO
PY - 2009
DO - 10.1587/transele.E92.C.144
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E92-C
IS - 1
JA - IEICE TRANSACTIONS on Electronics
Y1 - January 2009
AB - To improve product yield in high-product-mix semiconductor manufacturing, it is important to estimate the systematic yield inherent to each product and to extract problematic products that have low systematic yields. We propose a simplified and available yield model using a critical area analysis. This model enables the extraction of problematic products by the relationship between actual yields and the short sensitivities of the products. Furthermore, we present an enterprise-wide yield management system using this model and some useful applications. As a result, the system increases the efficiency of the yield management and enhancement dramatically.
ER -
English
