The search functionality is under construction.
The search functionality is under construction.

Author Search Result

[Author] Guo-Dong SU(1hit)

1-1hit
  • Micromechanical Photonic Integrated Circuits

    Ming C. WU  Li FAN  Guo-Dong SU  

     
    INVITED PAPER-Switches and Novel Devices

      Vol:
    E83-C No:6
      Page(s):
    903-911

    We report on a novel micromechanical photonic integrated circuits (PIC) for integrating free-space optical systems on a chip. Using polysilicon surface-micromachining technique, micro-optical elements, three-dimensional optomechanical structures, and microactuators are monolithically integrated on silicon substrate. We will discuss the basic building blocks of the micromechanical PIC, including XYZ micropositioners, 2-axis tilting micromirrors, scanning microlenses, and their integration with vertical cavity surface-emitting lasers. We will also discuss their applications in reconfigurable optical interconnect and active alignment in parallel free-space optical interconnect systems.