We have successfully produced laterally-grown grains on large (300 350 mm) glass substrates by means of a newly developed excimer laser crystallization system that features a high-precision mask stage and an auto-focusing system. The original grains were produced with a steep beam edge and their lateral growth was extended by repeated irradiation and translation. TFTs fabricated with these extended grains were found to have mobilities that remained almost constant at 270 cm2/Vs (n-ch. TFTs) and 230 cm2/Vs (p-ch. TFTs) over a wide range of laser fluence (400-600 mJ/cm2).

We proposed a new method to evaluate display legibility as a function of resolution. This method was able to evaluated display legibility without being restricted to the display resolution. Using this method, subjective psychological experiments were carried out to investigate display resolution, which provides legibility, in observing small characters. Samples viewed by subjects were images displayed on a high-resolution TFT-LCD that we developed, CRT images and printed documents for comparison. We have found that TFT-LCD legibility was much better than that of CRT, and that minimum resolution of about 175 dpi was needed for use in legible document viewers.