Thin Si films grown on anodized porous silicon have been characterized using a high-energy ion scattering technique with related simulations of MeV ions in solids. It turned out that the simulations are necessary and very usuful for quantitative and nondestractive analysis of thin films with thicknesses less than 100 nm. In the case of the epitaxial Si films examined, it is often insufficient for the characterization of crystalline quality to measure only the channeling minimum yield, and therefore, it is emphasized that angular scans over the critical angle in the vicinity of a channeling direction must be performed for the analysis of possible imperfections in thin films. The possible imperfections observed in the epitaxial specimen are treated quantitatively.