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Kaori MORIYAMA Shinji ODANAKA Youhei ICHIKAWA
This paper describes the dynamic behavior of a trench capacitor dRAM cell, named the SCC (Surrounded high-Capacitor Cell). A transient three-dimensional simulation reveals the raising of the substrate potential and the leakage current in the low-to-high state operation. The simulation results are verified by the experimental data using a test device. The characterization of this phenomenon allows design consideration of the scaled SCC.