Due to progressing process technology, yield of chips is reduced by timing violation caused by delay variation of gates and wires in fabrication. Recently, post-silicon delay tuning, which inserts programmable delay elements (PDEs) into clock trees before the fabrication and adjusts the delays of the PDEs to recover the timing violation after the fabrication, is promising to improve the yield. Although post-silicon delay tuning improves the yield, it increases circuit area and power consumption since the PDEs are inserted. In this paper, a PDE structure is taken into consideration to reduce the circuit area and the power consumption. Moreover, a delay selection algorithm, and a clustering method, in which some PDEs are merged into a PDE and the PDE is inserted for multiple registers, are proposed to reduce the circuit area and the power consumption. In computational experiments, the proposed method reduced the circuit area and the power consumption in comparison with an existing method.