Ultrahigh-speed continuous-tine delta-sigma modulators (DSMs) have been designed by using a fully-differential comparator consisting of resonant-tunneling diodes (RTDs) and HEMTs. Continuous-time lowpass and bandpass filters using HEMTs have also been incorporated to obtain lowpass- and bandpass-type DSMs, respectively. Circuit simulation assuming 0.1-µm InP-based HEMT and RTD technology has revealed a successful operation of the 2nd-order lowpass DSM at a sampling frequency of 20 GHz. The clock frequency was 10 GHz because of the double sampling function of the present comparator. The 2nd-order bandpass DSM has also been designed with a center frequency of 3 GHz. These results clearly show high potential of the present delta-sigma modulators.