Y-Ba-Cu-O films sputter-deposited at about 650 in high oxygen concentration gas are superconductive without heat treatment after the deposition. The films of 700 nm thickness have Tc end of 72 K on SrTiO3 and 65 K on sapphire substrates. Reduced interdiffusion, compared with post-annealed films at high temperatures, between the film and the substrate is confirmed.