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[Author] Mitsuru FUNATO(1hit)

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  • Growth Mechanism of Polar-Plane-Free Faceted InGaN Quantum Wells Open Access

    Yoshinobu MATSUDA  Mitsuru FUNATO  Yoichi KAWAKAMI  

     
    INVITED PAPER

      Vol:
    E101-C No:7
      Page(s):
    532-536

    The growth mechanisms of three-dimensionally (3D) faceted InGaN quantum wells (QWs) on (=1=12=2) GaN substrates are discussed. The structure is composed of (=1=12=2), {=110=1}, and {=1100} planes, and the cross sectional shape is similar to that of 3D QWs on (0001). However, the 3D QWs on (=1=12=2) and (0001) show quite different inter-facet variation of In compositions. To clarify this observation, the local thicknesses of constituent InN and GaN on the 3D GaN are fitted with a formula derived from the diffusion equation. It is suggested that the difference in the In incorporation efficiency of each crystallographic plane strongly affects the surface In adatom migration.