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Rudolf STRASSER Siegfried SELBERHERR
We present a simulation system which meets the requirements for practical application of inverse modeling in a professional environment. A tool interface for the integration of arbitrary simulation tools at the user level is introduced and a methodology for the formation of simulation networks is described. A Levenberg-Marquardt optimizer automates the inverse modeling procedure. Strategies for the efficient execution of simulation tools are discussed. An example demonstrates the extraction of doping profile information on the basis of electrical measurements.