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Practical Inverse Modeling with SIESTA

Rudolf STRASSER, Siegfried SELBERHERR

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Summary :

We present a simulation system which meets the requirements for practical application of inverse modeling in a professional environment. A tool interface for the integration of arbitrary simulation tools at the user level is introduced and a methodology for the formation of simulation networks is described. A Levenberg-Marquardt optimizer automates the inverse modeling procedure. Strategies for the efficient execution of simulation tools are discussed. An example demonstrates the extraction of doping profile information on the basis of electrical measurements.

Publication
IEICE TRANSACTIONS on Electronics Vol.E83-C No.8 pp.1303-1310
Publication Date
2000/08/25
Publicized
Online ISSN
DOI
Type of Manuscript
Special Section PAPER (Special Issue on 1999 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD'99))
Category
Simulation Methodology and Environment

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