We demonstrated a vertically coupled microring resonator (VCMRR) filter as an Add/Drop wavelength filter. However, the accuracy of center wavelength was not sufficiently high for dense wavelength division multiplexing (DWDM) systems. Thus, a UV trimming technique using a SiN (n=2.01 at λ=1.55 µm) ring core was previously developed. Although a wide center wavelength trimming range of -12.1 nm and the long-term stability of center wavelength were realized, the core size required for single-mode propagation was too small for fabrication using a photolithography process. Therefore in this study, we introduced SiON as the microring core to relax the single-mode condition of core size. We discovered a large UV sensitivity of SiON film formed by a PECVD method, and a wide range UV trimming of microring resonator of -10.5 nm was demonstrated using this phenomenon.

A reversible (or injective) cellular automaton (RCA) is a backward deterministic" CA, i.e., every configuration of it has at most one predecessor. Margolus has been shown that there is a computation-universal two-dimensional 2-state RCA model. Although his model is very interesting, it differs from a standard CA model because of its somewhat spatial and temporal non-uniformity. In this paper, we present two kinds of simple 16-state computation-universal models using the framework of two-dimensional reversible partitioned CA (PCA). Since PCA can be considered as a subclass of standard CA, we can immediately obtain 16-state standard RCA models from them. For each of these models, we designed a configuration which simulates a Fredkin gate. Since Fredkin gate has been known to be a universal logic element, computation-universality of these two models is concluded.