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[Author] Seok-Moon RYOO(1hit)

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  • A New Approach to 3-D Profilometry for the White Light Interferometric (WLI)

    Seok-Moon RYOO  Tae-Sun CHOI  

     
    LETTER-Image

      Vol:
    E84-A No:1
      Page(s):
    378-382

    A new approach to 3-D profilometry for the white light interferometric (WLI) is presented. The proposed method is the extended depth from focus (EDFF) that determine the zero optical path difference (OPD) from the quantity of fringe contrast degradation of white light interferometer. In the method, the variance of the mismatch function and the modified local variance function are used as the focus measures. The method has a theoretically unlimited range and can profile with subpixel accuracy both optically rough and smooth surfaces without changing algorithm.